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VAT 全系列真空阀门

更新:2014-12-28 16:03:08      点击:
  • 品牌   VAT
  • 型号   S26
  • 描述

    应用领域:半导体 光伏 真空镀膜及其他高真空获得领域...

产品介绍

漏率:10-10mbar.l/s

材质:不锈钢、铝合金

密封方式:金属密封

控制方式:手动、气动、电磁驱动

法兰接口:CF-R、ISO-K、ISO-KF

角阀或直通阀 带波纹管进给装置


注意事项

拆装阀门一定要用恰当的工具,定时做好阀门保养,

规范的操作和使用有利于延长阀门寿命,保持良好性能。




263 - HV angle valve DN100 - 160High vacuum angle 

valve with bellows feedthrough and large conductance.


264 - HV angle valve (DN10 - 250)High vacuum angle 

valves with bellows feedthrough. Modular design

.

284 - UHV angle valve (DN16, DN40, DN63)UHV angle 

valves. Extremely low outgassing rate.




615 - Butterfly with sealing functionDownstream pressure 

control and isolation valve Compact design Fast operation

 High-performance, integrated controller Low minimum con

trollable conductance


641 - PM-4 / PM-5 Pressure controller for Series 64Pressure 

controller for Series 64.0 valves (with stepper motor) and Series 64.2


 642 - Control gate valveControl gate valves with stepper motor 

for controlling and isolation. A valve in combination with an adaptive

 pressure controller PM4/5 is a pressure control system.



650 - Pendulum valve control systemPressure control and isolation 

valves with pendulum plate for downstream applications. Compact design. 

Fast, virtually particle-free and shock-free operation. Powerful integrated controller.


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